US 12,221,338 B2
Actuator device and method for manufacturing actuator device
Daiki Suzuki, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Mar. 19, 2024, as Appl. No. 18/609,082.
Application 18/609,082 is a continuation of application No. 17/267,144, granted, now 11,970,389, previously published as PCT/JP2019/031730, filed on Aug. 9, 2019.
Claims priority of application No. 2018-151230 (JP), filed on Aug. 10, 2018.
Prior Publication US 2024/0246810 A1, Jul. 25, 2024
Int. Cl. G02B 26/08 (2006.01); B81B 3/00 (2006.01)
CPC B81B 3/0045 (2013.01) [G02B 26/0833 (2013.01); B81B 2201/042 (2013.01); B81B 2207/07 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An actuator device comprising:
a support portion;
a first movable portion;
a second movable portion;
a first connection portion that connects the first movable portion and the second movable portion to each other such that the first movable portion is swingable around a first axis;
a second connection portion that connects the second movable portion and the support portion to each other such that the first movable portion is swingable around the first axis by vibrating the second movable portion; and
a drive unit that applies a drive force to the second movable portion,
wherein two natural angular frequencies ω1 and ω2 (where ω1<ω2) for vibration of the first movable portion and the second movable portion around the first axis satisfy the following equation (1) and do not satisfy the other following equation (2), and
a torsional spring constant of the second connection portion around the first axis is larger than a torsional spring constant of the first connection portion around the first axis,

OG Complex Work Unit Math
where in the above equations, ωii=(ki/ji)1/2, ki is a torsional spring constant of the first connection portion around the first axis, and ji is an inertia moment of the first movable portion around the first axis.