US 12,221,294 B2
Transport system and control method of transport system
Nobuaki Fujii, Kanagawa (JP); and Satoshi Nukushina, Kanagawa (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on May 24, 2022, as Appl. No. 17/752,245.
Claims priority of application No. 2021-096207 (JP), filed on Jun. 8, 2021; and application No. 2022-060217 (JP), filed on Mar. 31, 2022.
Prior Publication US 2022/0388786 A1, Dec. 8, 2022
Int. Cl. B65G 47/90 (2006.01); B65G 54/02 (2006.01); H01L 21/677 (2006.01); H02K 41/025 (2006.01)
CPC B65G 47/905 (2013.01) [B65G 54/02 (2013.01); H01L 21/67709 (2013.01); H02K 41/025 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A transport system comprising:
a mover on which a workpiece is mounted and which is movable in a first direction;
a stator that has a plurality of coils arranged in the first direction and applied force to the mover by using the plurality of coils to which current is applied, the force transporting the mover in the first direction while floating the mover in a second direction crossing the first direction;
a control unit that acquires a position and an attitude of the mover moving in the first direction while floating in the second direction and controls the current applied to the plurality of coils to control operation of the mover based on the acquired position and the acquired attitude; and
a positioning part that limits the movement of the mover,
wherein the positioning part includes a first positioning part that limits the movement of the mover in a direction of external force applied to the workpiece,
wherein the control unit lands the mover in the direction of the external force and performs pressing control to press the mover so that the movement of the mover is limited by the first positioning part,
wherein the control unit performs control to generate rotational force that cancels rotational force working on the mover by the pressing control.