US 12,220,840 B2
Sheet sticking apparatus
Yoshinori Kakinuma, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jul. 25, 2022, as Appl. No. 17/814,609.
Claims priority of application No. 2021-131408 (JP), filed on Aug. 11, 2021.
Prior Publication US 2023/0048636 A1, Feb. 16, 2023
Int. Cl. B28D 7/02 (2006.01); B28D 1/22 (2006.01); B28D 7/04 (2006.01)
CPC B28D 7/02 (2013.01) [B28D 1/22 (2013.01); B28D 7/04 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A sheet sticking apparatus comprising:
a sticking unit that sticks a sheet to a workpiece held by a chuck table; and
a cutting unit that cuts the stuck sheet,
wherein the cutting unit includes:
a cutting blade that cuts the sheet,
a movement unit that raises and lowers the cutting blade from and toward the chuck table or moves the cutting blade along an outer circumference of the workpiece, and
a cleaning part that removes adhering things from the cutting blade, and
wherein the cleaning part is disposed in the chuck table on a trajectory of the cutting blade that moves by the movement unit and executes cleaning by coming into contact with the cutting blade that moves.