US 12,220,785 B2
Chuck table and grinding method of workpieces
Keisuke Nakano, Tokyo (JP); and Ryo Shimazu, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Jun. 6, 2022, as Appl. No. 17/805,541.
Claims priority of application No. 2021-099331 (JP), filed on Jun. 15, 2021.
Prior Publication US 2022/0395959 A1, Dec. 15, 2022
Int. Cl. B24B 41/06 (2012.01); B24B 7/07 (2006.01)
CPC B24B 41/06 (2013.01) [B24B 7/07 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A chuck table comprising:
a first holding part with a first holding surface and a second holding part with a second holding surface that each have a same shape and are parallel to each other; and
a reference surface that surrounds each of the first holding surface and the second holding surface in plan view and is parallel to the first holding surface and the second holding surface, wherein;
the chuck table holds each of workpieces by a respective one of the first holding surface and the second holding surface,
the first holding surface and the second holding surface are disposed in such a manner that heights from the reference surface are in increasing order along a first direction parallel to each of the first holding surface and the second holding surface,
the first holding part is formed such that the height of the first holding surface above the reference surface is fixed at a first height,
the second holding part is formed such that the height of the second holding surface surface above the reference surface is fixed at a second height, and
the second height is greater than the first height, wherein, when the second height is greater than the first height, a bottom surface of the first holding part and a bottom surface of the second holding part are on a common plane, wherein the common plane is parallel to the reference surface.