CPC B05B 12/008 (2013.01) [B05B 1/14 (2013.01); B05B 15/40 (2018.02); B65D 83/28 (2013.01)] | 18 Claims |
16. A spray nozzle chip comprising:
a substrate having a spray side and a sieve side;
a sieve membrane comprising a sieve orifice that is provided on the sieve side; and
a spray membrane provided on the spray side, where the spray membrane comprises,
a spray orifice;
a pressure sensing device that measures deformation of the spray membrane to obtain a measure of pressure on the spray membrane; and
a reference pressure sensing device that measures deformation of a reference pressure region associated with reference pressure sensing device,
wherein the substrate has a fluid channel which connects the spray orifice with the sieve orifice, and
wherein the substrate comprises a closed cavity operatively associated with the reference pressure region.
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