US 12,220,672 B2
Liquid material vaporizing device
Hidetaka Yada, Kyoto (JP); Soichiro Hirai, Kyoto (JP); and Akira Matsuura, Kyoto (JP)
Assigned to HORIBA STEC, Co., Ltd., Kyoto (JP)
Filed by HORIBA STEC, Co., Ltd., Kyoto (JP)
Filed on Sep. 13, 2022, as Appl. No. 17/931,776.
Claims priority of application No. 2021-153911 (JP), filed on Sep. 22, 2021.
Prior Publication US 2023/0087193 A1, Mar. 23, 2023
Int. Cl. B01F 23/23 (2022.01); B01F 23/21 (2022.01); B01F 23/80 (2022.01); B01F 35/90 (2022.01)
CPC B01F 23/806 (2022.01) [B01F 23/211 (2022.01); B01F 23/23 (2022.01); B01F 35/90 (2022.01); B01F 2035/99 (2022.01)] 6 Claims
OG exemplary drawing
 
1. A liquid material vaporizing device comprising:
a gas-liquid mixer unit configured to mix a liquid material and a gas to generate a gas-liquid mixture;
a liquid material supplying pipe configured to supply the liquid material to the gas-liquid mixer unit;
a vaporizer unit configured to heat the gas-liquid mixture to vaporize the liquid material; and
a casing configured to house the gas-liquid mixer unit, the vaporizer unit, and the liquid material supplying pipe,
wherein a channel configured to guide convection of heat from the vaporizer unit to the liquid material supplying pipe is provided inside the casing.