US 12,219,876 B2
Method for producing piezoelectric actuator
Harunobu Koike, Matsumoto (JP); Takanori Aimono, Matsumoto (JP); Masao Nakayama, Shiojiri (JP); Motoki Takabe, Shiojiri (JP); Koji Sumi, Shiojiri (JP); Yasuhiro Itayama, Kai (JP); and Toshihiro Shimizu, Fujimi (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on May 4, 2022, as Appl. No. 17/736,121.
Application 17/736,121 is a division of application No. 17/104,153, filed on Nov. 25, 2020, abandoned.
Claims priority of application No. 2019-216461 (JP), filed on Nov. 29, 2019.
Prior Publication US 2022/0263010 A1, Aug. 18, 2022
Int. Cl. H10N 30/09 (2023.01); C23C 14/18 (2006.01); C23C 14/34 (2006.01); C23C 14/58 (2006.01); H10N 30/06 (2023.01)
CPC H10N 30/09 (2023.02) [C23C 14/185 (2013.01); C23C 14/34 (2013.01); C23C 14/5806 (2013.01); H10N 30/06 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A piezoelectric actuator, comprising:
a vibration plate;
a first electrode on the vibration plate;
a piezoelectric layer on the first electrode; and
a second electrode on the piezoelectric layer;
wherein the vibration plate has at least a first layer that is a single metal oxide layer containing zirconium, and a second layer that is a single metal oxide layer containing zirconium;
the first layer and the second layer are stacked on each other; and
a grain boundary of the first layer and a grain boundary of the second layer are shifted in a lateral direction.