CPC H10K 71/166 (2023.02) [C23C 14/042 (2013.01); C23C 14/24 (2013.01); C23C 14/34 (2013.01); H10K 71/00 (2023.02); H10K 71/10 (2023.02); H10K 71/164 (2023.02); B23K 26/22 (2013.01)] | 14 Claims |
1. A mask, wherein the mask comprises a mask part and a peripheral part surrounding the mask part;
the mask part comprises at least one mask unit, and the mask unit comprises an opening and a first main body surrounding the opening; and
a thickness of at least part of area of the peripheral part is greater than a thickness of the mask part, and the peripheral part is configured to contact a base plate to be formed with a film, and support the base plate to be formed with a film, whereby the mask part and the base plate to be formed with a film have a gap therebetween;
wherein the peripheral part comprises a second main body and a plurality of supporters; and
the plurality of supporters are located merely within corner regions of the mask, and the first main body and the plurality of supporters have no overlapping part, whereby the first main body and the base plate to be formed with a film have a gap therebetween.
|