US 12,219,688 B2
Dielectric barrier plasma generator and plasma discharge starting method for dielectric barrier plasma generator
Takahiro Hiraoka, Tokyo (JP); Kensuke Nakamura, Tokyo (JP); and Takanori Samejima, Tokyo (JP)
Assigned to Ushio Denki Kabushiki Kaisha, Tokyo (JP)
Appl. No. 17/800,881
Filed by Ushio Denki Kabushiki Kaisha, Tokyo (JP)
PCT Filed Jan. 18, 2021, PCT No. PCT/JP2021/001448
§ 371(c)(1), (2) Date Aug. 18, 2022,
PCT Pub. No. WO2021/181879, PCT Pub. Date Sep. 16, 2021.
Claims priority of application No. 2020-043777 (JP), filed on Mar. 13, 2020.
Prior Publication US 2023/0100544 A1, Mar. 30, 2023
Int. Cl. H05H 1/00 (2006.01); H05H 1/24 (2006.01)
CPC H05H 1/2406 (2013.01) [H05H 1/245 (2021.05)] 15 Claims
OG exemplary drawing
 
1. The dielectric barrier plasma generator comprising:
a dielectric substrate having a first surface and a second surface;
a high-voltage electrode having a proximal end and a distal end and located on the first surface of the dielectric substrate;
a low-voltage electrode located to face the second surface of the dielectric substrate;
a power introduction section located near one of the ends of the high-voltage electrode;
a gas channel having a first end and a second end formed between the dielectric substrate and the low-voltage electrode in a direction from the first end to the second end to allow gas to flow from the first end of the gas channel to the second end while generating plasma thereof;
a blowout outlet formed at the second end of the gas channel to blow out the gas that has flown through the gas channel and the plasma that has been generated in the gas channel, wherein a thickness between the first surface and the second surface of the dielectric substrate becomes thinner over a predetermined narrowing portion the dielectric substrate as approaching closer to the blowout outlet; and
a clearance area located on the first surface of the dielectric substrate between the distal end of the high-voltage electrode and the blowout outlet for exposing the dielectric substrate.