US 12,218,650 B2
Transversely-excited film bulk acoustic resonator
Ventsislav Yantchev, Sofia (BG)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Aug. 3, 2023, as Appl. No. 18/364,911.
Application 18/364,911 is a continuation of application No. 17/095,591, filed on Nov. 11, 2020, granted, now 11,870,423.
Application 17/095,591 is a continuation in part of application No. 16/819,623, filed on Mar. 16, 2020, granted, now 10,868,510, issued on Nov. 24, 2020.
Application 16/819,623 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Jan. 20, 2021.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 63/082,317, filed on Sep. 23, 2020.
Claims priority of provisional application 62/818,571, filed on Mar. 14, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2024/0022233 A1, Jan. 18, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/56 (2006.01); H03H 3/02 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H10N 30/87 (2023.01)
CPC H03H 9/568 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02031 (2013.01); H03H 9/02062 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 2003/023 (2013.01); H03H 9/02039 (2013.01); H10N 30/877 (2023.02)] 20 Claims
OG exemplary drawing
 
1. An acoustic resonator comprising:
a substrate;
a lithium niobate (LN) plate supported by the substrate and having a portion that forms a diaphragm over a cavity;
an interdigital transducer (IDT) at a surface of the LN plate and having interleaved fingers on the diaphragm; and
a half-lambda dielectric layer on the diaphragm,
wherein the LN plate comprises Euler angles that are [0°, β, 0°], where 20°≤β≤25°.