US 12,218,646 B2
Surface acoustic wave resonator device and method for manufacturing the same, and filter
Chencheng Zhou, Guangdong (CN); Jie Zou, Guangdong (CN); and Gongbin Tang, Guangdong (CN)
Assigned to Shenzhen Newsonic Technologies Co., Ltd., Shenzhen (CN)
Filed by Shenzhen Newsonic Technologies Co., Ltd., Guangdong (CN)
Filed on Dec. 27, 2023, as Appl. No. 18/397,663.
Prior Publication US 2024/0186977 A1, Jun. 6, 2024
Int. Cl. H03H 9/02 (2006.01); H03H 3/08 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01)
CPC H03H 9/02818 (2013.01) [H03H 3/08 (2013.01); H03H 9/02834 (2013.01); H03H 9/145 (2013.01); H03H 9/25 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A surface acoustic wave resonator device, comprising an interdigital electrode body region, and comprising:
a piezoelectric substrate;
a first interdigital electrode structure and a second interdigital electrode structure, disposed on a side of the piezoelectric substrate and electrically isolated from each other, wherein the first interdigital electrode structure comprises a first interdigital electrode, a first interdigital electrode connection part and a first interdigital electrode lead-out part that are electrically connected to each other, and the second interdigital electrode structure comprises a second interdigital electrode, a second interdigital electrode connection part and a second interdigital electrode lead-out part that are electrically connected to each other; wherein the first interdigital electrode and the second interdigital electrode extend along a first direction and are alternately arranged along a second direction, the first direction and the second direction intersect each other; each interdigital electrode of the first interdigital electrode and the second interdigital electrode comprises a body portion located in the interdigital electrode body region, and has a first end and a second end opposite to each other in the first direction; the first interdigital electrode connection part and the first interdigital electrode lead-out part are respectively connected to the first end and the second end of the first interdigital electrode, and the second interdigital electrode connection part and the second interdigital electrode lead-out part are respectively connected to the first end and the second end of the second interdigital electrode; and
a spanning structure, located between the first interdigital electrode connection part and the second interdigital electrode and between the second interdigital electrode connection part and the first interdigital electrode in a direction perpendicular to a main surface of the piezoelectric substrate;
wherein the first interdigital electrode connection part and the second interdigital electrode connection part are respectively located on opposite sides of the interdigital electrode body region in the first direction, and extend continuously along the second direction; the first interdigital electrode connection part is in contact with the first interdigital electrode and electrically isolated from the second interdigital electrode through the spanning structure; and the second interdigital electrode connection part is in contact with the second interdigital electrode and electrically isolated from the first interdigital electrode through the spanning structure.