US 12,218,644 B2
Acoustic resonator
David Woolsey, Berkeley, CA (US); and Gabriel A. Matus, Morgan Hill, CA (US)
Filed by David Woolsey, Berkeley, CA (US)
Filed on Mar. 5, 2021, as Appl. No. 17/194,109.
Application 17/194,109 is a continuation of application No. 16/544,853, filed on Aug. 19, 2019, granted, now 10,944,372.
Claims priority of provisional application 62/720,111, filed on Aug. 20, 2018.
Claims priority of provisional application 62/720,107, filed on Aug. 20, 2018.
Prior Publication US 2021/0194450 A1, Jun. 24, 2021
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/25 (2006.01); H03H 3/04 (2006.01); H03H 9/17 (2006.01)
CPC H03H 3/04 (2013.01) [H03H 9/172 (2013.01); H03H 9/25 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A resonator comprising:
a piezoelectric material having an acoustic path that is longer in a central region of the resonator than at edges of the resonator by shaping the resonator, the shaping comprising adjusting an acoustic stiffness of the piezoelectric material, wherein the piezoelectric material is stiffened with an ion implantation gradient, with the ion implantation stiffening edges of the piezoelectric material more than a center of the piezoelectric material.