CPC H01S 5/0225 (2021.01) [H01S 5/18344 (2013.01); H01S 5/34313 (2013.01); H01S 5/423 (2013.01)] | 15 Claims |
1. An optoelectronic device, comprising:
a semiconductor substrate having first and second faces;
an emitter, which comprises a mesa, having sidewalls, disposed on the first face of the semiconductor substrate and is configured to emit a beam of radiation through the substrate;
at least one curved optical surface, which is formed in the second face of the semiconductor substrate; and
a first reflector, having a reflectance exceeding 94%, extending across the first face beyond the sidewalls of the mesa in proximity to the emitter and a second reflector, which is planar and is disposed on the second face in proximity to the curved optical surface, such that the second reflector reflects the beam that was emitted through the semiconductor substrate by the emitter to reflect back through the semiconductor substrate toward the first reflector, which then reflects the beam to pass through the semiconductor substrate so as to exit from the semiconductor substrate through the curved optical surface.
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