US 12,218,347 B2
MEMS anode battery
Payam Bozorgi, Santa Barabara, IN (US); and Shannon Gott, Santa Barabara, CA (US)
Assigned to PiMEMS, Inc., Pleasanton, CA (US)
Appl. No. 17/415,145
Filed by PiMEMS, Inc., Pleasanton, CA (US)
PCT Filed Dec. 17, 2019, PCT No. PCT/US2019/066938
§ 371(c)(1), (2) Date Jun. 17, 2021,
PCT Pub. No. WO2020/154053, PCT Pub. Date Jul. 30, 2020.
Claims priority of provisional application 62/782,367, filed on Dec. 20, 2018.
Prior Publication US 2022/0059829 A1, Feb. 24, 2022
Int. Cl. H01M 4/485 (2010.01); H01M 4/04 (2006.01); H01M 4/36 (2006.01); H01M 10/058 (2010.01); H01M 4/02 (2006.01)
CPC H01M 4/485 (2013.01) [H01M 4/0402 (2013.01); H01M 4/366 (2013.01); H01M 10/058 (2013.01); H01M 2004/021 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A method for fabricating a battery, comprising:
providing a metal anode;
etching a plurality of microfabricated raised features into the metal anode, wherein the microfabricated raised metal features have an aspect ratio of at least 1 and a pitch of between 1-50 microns; and
depositing a metal coating of a second metal conformally over the metal anode and the plurality of microfabricated raised features;
depositing another layer of a metal over the metal coating, and oxidizing the layer of metal to form a layer of metal oxide having a microfabricated microroughness in the layer of metal oxide of at least 1 nm rms wherein the layer of metal comprises a layer of titanium, and the metal oxide comprises titanium dioxide, such that the microroughness is formed in the titanium dioxide as nanostructured titanium (NST).