US 12,218,270 B2
Light source unit and heating treatment device
Takafumi Mizojiri, Tokyo (JP); Keita Kanazu, Tokyo (JP); and Takahiro Inoue, Tokyo (JP)
Assigned to Ushio Denki Kabushiki Kaisha, Tokyo (JP)
Filed by Ushio Denki Kabushiki Kaisha, Tokyo (JP)
Filed on Aug. 23, 2021, as Appl. No. 17/409,525.
Claims priority of application No. 2020-158210 (JP), filed on Sep. 23, 2020.
Prior Publication US 2022/0093820 A1, Mar. 24, 2022
Int. Cl. H01L 33/00 (2010.01); H01L 25/075 (2006.01); H01L 33/50 (2010.01)
CPC H01L 33/0095 (2013.01) [H01L 25/0753 (2013.01); H01L 33/50 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A heating treatment device for heating a substrate to be treated, the heating treatment device comprising:
a chamber for accommodating the substrate to be treated,
a supporter for supporting the substrate to be treated in the chamber, and
a light source unit further comprising:
a board having a main surface, and
a plurality of light source areas formed by a plurality of Light Emitting Diode (LED) elements mounted on the board, wherein
each of the light source areas is provided with a plurality of LED element groups connected in parallel, each of the LED element groups being composed of a plurality of the LED elements connected in series,
a first line connecting a first anode electrode with a second anode electrode and a second line connecting a first cathode electrode with a second cathode electrode, one end of each of the LED element groups being connected to the first line while the other end of each of the LED element groups being connected to the second line;
a Zener diode connected to the first anode electrode and the first cathode electrode; and
at least one of the light source areas is a single-wavelength light source area in which all of the LED elements emit light having substantially a same peak wavelength.