US 12,218,269 B2
Substrate processing apparatus including light receiving device and calibration method of light receiving device
Kazuhiro Nishiwaki, Tama (JP)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Feb. 10, 2021, as Appl. No. 17/172,082.
Claims priority of provisional application 62/976,311, filed on Feb. 13, 2020.
Prior Publication US 2021/0257509 A1, Aug. 19, 2021
Int. Cl. H01L 31/18 (2006.01); G01J 1/42 (2006.01); G01N 21/27 (2006.01); H01J 37/32 (2006.01)
CPC H01L 31/1876 (2013.01) [G01J 1/42 (2013.01); G01N 21/274 (2013.01); H01J 37/32715 (2013.01); H01J 37/32972 (2013.01); H01L 31/1892 (2013.01); G01J 2001/4247 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A substrate processing apparatus comprising:
a chamber configured to contain a stage;
a light receiving device configured to receive light inside the chamber;
a substrate transfer apparatus that includes a shaft and a rotation arm configured to rotate with rotation of the shaft and is configured to supply a plurality of light beams having different amounts of light to the light receiving device; and
a light source, wherein a plurality of holes are provided on a side face of the shaft, the plurality of holes are configured to pass light of the light source.