US 12,218,260 B2
Optical sensing device having inclined reflective surface
Chih-Chiang Chang, Hsinchu (TW); and Chia-Chan Chen, Hsinchu County (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jul. 26, 2022, as Appl. No. 17/874,276.
Application 17/874,276 is a continuation of application No. 17/096,961, filed on Nov. 13, 2020, granted, now 11,552,205.
Prior Publication US 2022/0367737 A1, Nov. 17, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 31/0232 (2014.01); H01L 31/0352 (2006.01); H01L 31/103 (2006.01); H01L 31/18 (2006.01)
CPC H01L 31/02327 (2013.01) [H01L 31/035281 (2013.01); H01L 31/103 (2013.01); H01L 31/1804 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A device for optical sensing, comprising:
a substrate comprising a trench;
a photodetector disposed in the substrate and next to the trench;
a first dielectric layer disposed on the substrate and comprising a through hole connected to the trench; and
a reflector disposed on the first dielectric layer and extending into the trench through a sidewall of the through hole, wherein the reflector exposes a side of the trench close to the photodetector.