US 12,218,163 B2
Image acquisition device
Mickael Fourel, Champagnier (FR); and Laurent-Luc Chapelon, Domene (FR)
Assigned to STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed by STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed on Feb. 29, 2024, as Appl. No. 18/591,950.
Application 18/591,950 is a division of application No. 17/224,720, filed on Apr. 7, 2021, granted, now 11,948,950.
Claims priority of application No. 2003759 (FR), filed on Apr. 15, 2020.
Prior Publication US 2024/0204017 A1, Jun. 20, 2024
Int. Cl. H01L 27/146 (2006.01); G02B 1/10 (2015.01); G02B 1/14 (2015.01); G02B 3/00 (2006.01)
CPC H01L 27/14621 (2013.01) [G02B 1/10 (2013.01); G02B 1/14 (2015.01); G02B 3/0012 (2013.01); H01L 27/14618 (2013.01); H01L 27/14627 (2013.01); H01L 27/14685 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method for producing an image acquisition device, comprising:
forming an array of visible light color filters;
depositing at least one layer made from an inorganic dielectric material by plasma-enhanced chemical vapor deposition on the array of visible light color filters; and
forming an array of microlenses on the at least one layer made from an inorganic dielectric material and extending over the array of visible light color filters;
wherein depositing comprises using a metal nitride for the inorganic dielectric material.