US 12,218,120 B2
Device mismatch mitigation for medium range and beyond distances
Dureseti Chidambarrao, Weston, CT (US); Matthew Stephen Angyal, Stormville, NY (US); Noah Zamdmer, Sleepy Hollow, NY (US); Varadarajan Vidya, Sudbury, MA (US); James Strom, Rochester, MN (US); Grant P. Kesselring, Rochester, MN (US); and Erik Unterborn, Cary, NC (US)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Jun. 22, 2021, as Appl. No. 17/354,469.
Prior Publication US 2022/0406769 A1, Dec. 22, 2022
Int. Cl. H01L 27/02 (2006.01); G06F 30/392 (2020.01)
CPC H01L 27/0207 (2013.01) [G06F 30/392 (2020.01)] 12 Claims
OG exemplary drawing
 
1. A structure comprising:
a first active circuit having an east side, a west side, a north side and a south side, wherein a first area is located adjacent to the east side of the first active circuit, a second area is located adjacent to the west side of the first active circuit, a third area is located adjacent to the north side of the first active circuit and a fourth area is located adjacent to the south side of the first active circuit, and the first area and the second area do not extend beyond a north sidewall and a south sidewall of the first active circuit, the third area and the fourth area do not extend beyond an east sidewall and a west sidewall of the first active circuit, and only one side of the first area, the second area, the third area and the fourth area is in contact with active circuitry, the active circuitry being the first active circuit, and wherein at least one of the first area, the second area, the third area and the fourth area comprises an active circuit-containing region containing another active circuit; and
a second active circuit spaced apart from the first active circuit by a distance of greater than 0.5 microns and containing a device that needs matching to a device of the first active circuit, the second active circuit having an east side, a west side, a north side and a south side, wherein a fifth area is located adjacent to the east side of the second active circuit, a sixth area is located adjacent to the west side of the second active circuit, a seventh area is located adjacent to the north side of the second active circuit and an eighth area is located adjacent to the south side of the second active circuit, the fifth area and the sixth area do not extend beyond a north sidewall and a south sidewall of the second active circuitry, the seventh area and the eighth area do not extend beyond an east sidewall and a west sidewall of the second active circuitry, and only one side of the fifth area, the sixth area, the seventh area and the eighth area is in contact with an active circuitry, the active circuitry being the second active circuitry, and wherein at least one of the fifth area, the sixth area, the seventh area and the eighth area comprises a circuit mimic fill area that substantially matches the active circuit-containing region that is adjacent to the first active circuit, and wherein the circuit mimic fill area is located on an equivalent side of the second active circuit as the active circuit-containing region that is present adjacent the first active circuit and wherein the circuit mimic fill area is spaced apart from the first area, the second area and the third area of the first active circuit.