CPC H01L 23/544 (2013.01) [H01L 21/768 (2013.01); H01L 22/12 (2013.01); H01L 23/5226 (2013.01); H01L 23/528 (2013.01); H01L 22/32 (2013.01); H01L 2223/54426 (2013.01); H01L 2223/54433 (2013.01)] | 12 Claims |
1. A semiconductor device comprising:
a circuit pattern including a plurality of unit patterns that are disposed in a repeating manner in a first direction; and
a discrimination pattern provided in the circuit pattern and configured to discriminate the plurality of unit patterns from each other,
wherein the discrimination pattern has a corresponding one of a plurality of discrimination figures different from each other, and each of the plurality of discrimination figures corresponds to a respective one of the plurality of unit patterns,
wherein the plurality of discrimination figures are arranged along a second direction, which is different from the first direction, and respective lengths of the plurality of discrimination figures in the second direction are different from each other.
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