CPC H01L 23/5286 (2013.01) [H01L 21/8221 (2013.01); H01L 23/50 (2013.01); H01L 23/5225 (2013.01); H01L 24/26 (2013.01); H01L 25/0657 (2013.01); H01L 27/0688 (2013.01); H01L 24/08 (2013.01); H01L 24/16 (2013.01); H01L 2224/08147 (2013.01); H01L 2224/16145 (2013.01); H01L 2224/80895 (2013.01); H01L 2224/80896 (2013.01); H01L 2924/15311 (2013.01)] | 22 Claims |
1. A stacked integrated circuit (IC) device comprising first and second IC dies directly hybrid bonded to each other by metal-to-metal bonding and oxide-to-oxide bonding, the first IC die having power interconnect lines formed on a rear surface thereof, wherein active circuit components of one or both of the first and second IC dies are electrically connected to the power interconnect lines by through silicon vias (TSVs) formed within the first IC die.
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