| CPC H01L 23/5254 (2013.01) [H01L 23/5258 (2013.01); H01L 23/53285 (2013.01)] | 25 Claims |
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1. A method of constructing a superconducting switch, comprising:
depositing a sacrificial layer on top of a substrate;
patterning the sacrificial layer to remove portions of the sacrificial layer;
depositing a superconducting metal layer, wherein a first portion of the superconducting metal layer is on top of the substrate, and wherein a second portion of the superconducting metal layer is on top of the sacrificial layer;
patterning the superconducting metal layer to form a superconducting metal line over the sacrificial layer; and
etching the patterned sacrificial layer from under the superconducting metal line to release the metal line from the substrate.
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