US 12,217,997 B2
Cleanroom compatible robotic end effector exchange system
Benjamin James Thomas Clarke, Milpitas, CA (US); Asaf Wiseman, Milpitas, CA (US); Tzachi Pressburger, Milpitas, CA (US); Michael Brisman, Milpitas, CA (US); and Joseph A. Di Regolo, Milpitas, CA (US)
Assigned to KLA CORPORATION, Milpitas, CA (US)
Filed by KLA CORPORATION, Milpitas, CA (US)
Filed on Jan. 18, 2023, as Appl. No. 18/156,131.
Claims priority of provisional application 63/307,247, filed on Feb. 7, 2022.
Claims priority of provisional application 63/477,761, filed on Dec. 29, 2022.
Prior Publication US 2023/0298926 A1, Sep. 21, 2023
Int. Cl. H01L 21/68 (2006.01); B25J 15/04 (2006.01); B25J 19/00 (2006.01); G01B 11/06 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68707 (2013.01) [B25J 15/0433 (2013.01); B25J 15/0491 (2013.01); B25J 19/0075 (2013.01); G01B 11/06 (2013.01); Y10T 29/49947 (2015.01)] 9 Claims
OG exemplary drawing
 
1. A method comprising:
disposing a robot interface on a robot arm;
selectively coupling an end effector to the robot arm via the robot interface, wherein the end effector comprises an upper jaw and a lower jaw, the upper jaw and the lower jaw being spaced apart in a first direction and biased together; and
disposing a substrate on a pair of arms of the end effector, the pair of arms being spaced apart in a second direction orthogonal to the first direction;
wherein when the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw and the lower jaw.