US 12,217,991 B2
Portable robotic semiconductor pod loader
Chih-Kuo Chang, Hsinchu County (TW); Cheng-Lung Wu, Zhunan Township (TW); Ting-Yau Shiu, Taoyuan (TW); Wei-Chen Lee, Zhubei (TW); Yang-Ann Chu, Hsinchu (TW); and Jiun-Rong Pai, Jhubei (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company Limited, Hsinchu (TW)
Filed on Jul. 29, 2021, as Appl. No. 17/443,995.
Prior Publication US 2023/0035556 A1, Feb. 2, 2023
Int. Cl. H01L 21/677 (2006.01); B25J 9/16 (2006.01); B25J 19/02 (2006.01)
CPC H01L 21/67706 (2013.01) [B25J 9/1664 (2013.01); B25J 9/1697 (2013.01); B25J 19/021 (2013.01); H01L 21/67727 (2013.01); H01L 21/67733 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A portable robotic semiconductor pod loader, comprising:
a base housing;
a top housing provided above and supported by the base housing;
a load port supported by the base housing and configured to receive a semiconductor pod from an overhead automated material handling system, wherein the load port is configured to:
rotate the semiconductor pod to orient an opening of the semiconductor pod with a staging area of a semiconductor processing tool, and
support at least one sensor configured to detect a presence or placement of the semiconductor pod on the load port;
a robot supported by the top housing,
wherein the robot is configured to provide the semiconductor pod from the load port to the staging area of the semiconductor processing tool; and
a set of powered wheels supporting the base housing and enabling the base housing to autonomously or semi-autonomously move in an unbounded manner in three or more directions of a plane.