CPC H01L 21/67706 (2013.01) [B25J 9/1664 (2013.01); B25J 9/1697 (2013.01); B25J 19/021 (2013.01); H01L 21/67727 (2013.01); H01L 21/67733 (2013.01)] | 20 Claims |
1. A portable robotic semiconductor pod loader, comprising:
a base housing;
a top housing provided above and supported by the base housing;
a load port supported by the base housing and configured to receive a semiconductor pod from an overhead automated material handling system, wherein the load port is configured to:
rotate the semiconductor pod to orient an opening of the semiconductor pod with a staging area of a semiconductor processing tool, and
support at least one sensor configured to detect a presence or placement of the semiconductor pod on the load port;
a robot supported by the top housing,
wherein the robot is configured to provide the semiconductor pod from the load port to the staging area of the semiconductor processing tool; and
a set of powered wheels supporting the base housing and enabling the base housing to autonomously or semi-autonomously move in an unbounded manner in three or more directions of a plane.
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