US 12,217,990 B2
Method for treating objects and apparatus for carrying out the method
Benedikt Straub, Guetenbach (DE); Markus Uihlein, Guetenbach (DE); Florian Kaltenbach, Guetenbach (DE); and Stephan Alexis Pediaditakis, Guetenbach (DE)
Assigned to RENA Technologies GmbH, Gütenbach (DE)
Appl. No. 16/972,258
Filed by RENA Technologies GmbH, Guetenbach (DE)
PCT Filed Jun. 3, 2019, PCT No. PCT/DE2019/100488
§ 371(c)(1), (2) Date Dec. 4, 2020,
PCT Pub. No. WO2019/233526, PCT Pub. Date Dec. 12, 2019.
Claims priority of application No. 102018113264 (DE), filed on Jun. 4, 2018.
Prior Publication US 2021/0159105 A1, May 27, 2021
Int. Cl. H01L 21/677 (2006.01); B65G 13/02 (2006.01); H01L 21/67 (2006.01); H01L 31/18 (2006.01)
CPC H01L 21/67706 (2013.01) [B65G 13/02 (2013.01); H01L 21/6708 (2013.01); H01L 31/186 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A treatment apparatus comprising:
a basin configured to hold a treatment solution;
a transport apparatus configured to transport objects to be treated in a transport direction through the basin;
at least one feed device arranged in said basin and configured for treatment solution to be introduced into said basin; and
said at least one feed device having upwardly directed outlet openings for spraying the treatment solution upward, and said at least one feed device having a straight extent, at least in sections, which is oriented obliquely with respect to the transport direction; and
said treatment apparatus being configured to transport the objects to be treated in a plurality of tracks next to one another along the transport direction, and said at least one feed device is one of a plurality of feed devices, the treatment apparatus in each case having a dedicated feed device for each track; and
the treatment apparatus being configured for carrying out a method of treating objects, having the steps of:
introducing a treatment solution into a basin by way of a feed device which includes upwardly directed outlet openings;
spraying the treatment solution upward from the upwardly directed outlet openings, thus forming treatment solution jets;
transporting objects to be treated through the basin with a transport apparatus, and thereby moving the objects through the basin above the upwardly directed outlet openings, and
during a transport of the objects through the basin, bringing a downwardly pointing surface of the objects into contact with the treatment solution jets;
said straight extent of said at least one feed device extending over an entire length of the at least one feed device;
said at least one feed device being configured to generate treatment solution jets which widen conically from the upwardly directed outlet openings;
the straight extent being oriented at an angle α with respect to the transport direction, and the angle α is at least approximately:
α=arcsin((B−2R)/L);
where: L is a length of the at least one feed device, B is a width of the objects to be treated, and R is a radius of the treatment solution jets at a level of a transport plane of the transport apparatus.