US 12,217,981 B2
Lid separation device for vacuum chamber
Vijayabhaskara Venkatagiriyappa, Bangalore (IN); Srinivas Ramakrishna, Bangalore (IN); and Mario Daniel Sanchez, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 8, 2022, as Appl. No. 17/689,453.
Prior Publication US 2023/0290655 A1, Sep. 14, 2023
Int. Cl. H01L 21/67 (2006.01)
CPC H01L 21/67126 (2013.01) 20 Claims
OG exemplary drawing
 
1. A lid separator for a vacuum processing chamber, comprising:
a shaft having a first end and an opposing second end, wherein the shaft is threaded along at least a first portion of the shaft; and
a contact pad having an outer diameter greater than an outer diameter of the shaft, a recess disposed in a first side of the contact pad, and a central opening disposed through a second side of the contact pad, opposite the first side, and into the recess, wherein the shaft is coupled to the contact pad, wherein the first end of the shaft extends through the central opening and into the recess without reaching the first side of the contact pad, and wherein the first portion and the second end of the shaft extend away from the second side of the contact pad.