US 12,217,950 B2
Magnet system, sputtering device and housing cover
Thorsten Sander, Dresden (DE); Klaus Schneider, Arnsdorf (DE); Frank Meissner, Dresden (DE); Goetz Grosser, Dresden (DE); and Steffen Mosshammer, Rabenau (DE)
Assigned to VON ARDENNE Asset GmbH & Co. KG, Dresden (DE)
Filed by VON ARDENNE Asset GmbH & Co. KG, Dresden (DE)
Filed on Nov. 11, 2022, as Appl. No. 17/985,175.
Claims priority of application No. 10 2021 129 523.8 (DE), filed on Nov. 12, 2021.
Prior Publication US 2023/0154734 A1, May 18, 2023
Int. Cl. H01J 37/34 (2006.01); C23C 14/35 (2006.01)
CPC H01J 37/3455 (2013.01) [C23C 14/35 (2013.01); H01J 37/3405 (2013.01); H01J 37/342 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A magnet system comprising:
a housing comprising a housing interior;
a magnet holder arranged in the housing interior and rigidly attached to the housing; and
a housing cover which, when assembled with the housing, forms a fluid-tight chamber, wherein the housing cover comprises:
a gear stage;
a generator; and
a rotary coupling that couples the gear stage to the generator.