US 12,217,940 B2
Sensor data compression in a plasma tool
John Valcore, Jr., Worthington, OH (US); Travis Joseph Wong, Oakland, CA (US); Ying Wu, Livermore, CA (US); Sandeep Mudunuri, Austin, TX (US); and Bostjan Pust, San Ramon, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/926,574
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed May 10, 2021, PCT No. PCT/US2021/031655
§ 371(c)(1), (2) Date Nov. 18, 2022,
PCT Pub. No. WO2021/242512, PCT Pub. Date Dec. 2, 2021.
Claims priority of provisional application 63/030,748, filed on May 27, 2020.
Prior Publication US 2023/0207267 A1, Jun. 29, 2023
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/32926 (2013.01)] 34 Claims
OG exemplary drawing
 
1. A method for compressing data, comprising:
receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool, wherein the RF transmission path is from an output of an RF generator to an electrode of the plasma tool, wherein said receiving the plurality of measurement signals includes:
receiving a first electrical signal representing a first parameter associated with a first RF signal; and
receiving a second electrical signal representing a second parameter associated with a second RF signal;
converting the plurality of measurement signals from an analog form to a digital form to sample data, wherein said converting the plurality of measurement signals includes:
sampling the first electrical signal to output a first plurality of sample sets; and
sampling the second electrical signal to output a second plurality of sample sets;
processing the sample data to output compressed data, wherein said processing the sample data includes:
determining a first maximum peak-to-peak value from the first plurality of sample sets; or
determining a second maximum peak-to-peak value from the second plurality of sample sets; or
determining a statistical frequency value from the first plurality of sample sets; or
determining a statistical phase value from the first and second pluralities of sample sets; or
a combination of two or more thereof; and
sending the compressed data to a controller for controlling the plasma tool.