US 12,217,933 B2
Detachable column unit of scanning electron microscope, and method for providing the same
Jun Hee Lee, Daejeon (KR)
Assigned to COXEM CO., LTD, Daejeon (KR)
Filed by COXEM CO., LTD, Daejeon (KR)
Filed on Mar. 8, 2024, as Appl. No. 18/599,199.
Application 18/599,199 is a continuation of application No. 17/436,655, granted, now 11,978,610, previously published as PCT/KR2020/002488, filed on Feb. 27, 2020.
Claims priority of application No. 10-2019-0033312 (KR), filed on Mar. 25, 2019.
Prior Publication US 2024/0212978 A1, Jun. 27, 2024
Int. Cl. H01J 37/28 (2006.01); H01J 37/20 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/20 (2013.01); H01J 2237/2801 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A detachable column unit, comprising:
a column (10) having a vacuum space (S1) in which a condenser lens (12) and an objective lens (13) are installed, and a membrane (19) being installed at a bottom of the column (10); and
a membrane protective cover (20) being installed at the bottom of the column (10) to cover the membrane (19);
wherein air is disallowed to pass through the membrane (19) while an electron generated by an electron gun (11) is allowed to pass through the membrane (19) to scan a sample,
wherein a space formed by the membrane protective cover (20), the membrane (19), and the bottom of the column (10) is a sealed space,
wherein the membrane protective cover (20) is removed before the column (10) is coupled to a sample installation unit (30).