US 12,217,925 B2
Radio frequency micro-electro-mechanical switch and radio frequency device
Yingli Shi, Beijing (CN)
Assigned to Beijing BOE Technology Development Co., Ltd., Beijing (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
Appl. No. 17/796,501
Filed by Beijing BOE Technology Development Co., Ltd., Beijing (CN); and BOE TECHNOLOGY GROUP CO., LTD., Beijing (CN)
PCT Filed Aug. 25, 2021, PCT No. PCT/CN2021/114538
§ 371(c)(1), (2) Date Jul. 29, 2022,
PCT Pub. No. WO2023/023976, PCT Pub. Date Mar. 2, 2023.
Prior Publication US 2024/0186095 A1, Jun. 6, 2024
Int. Cl. H01H 59/00 (2006.01); B81B 3/00 (2006.01)
CPC H01H 59/0009 (2013.01) [B81B 3/0021 (2013.01); B81B 2201/018 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/019 (2013.01); H01H 2059/0027 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A radio frequency micro-electro-mechanical switch, comprising:
a substrate; and
a signal electrode, a first ground electrode, a second ground electrode and a connecting membrane bridge,
wherein the signal electrode, the first ground electrode, the second ground electrode and the connecting membrane bridge are disposed on the substrate, the connecting membrane bridge crosses over the signal electrode, and
the connecting membrane bridge comprises a body portion and at least two stretchable structures,
each of the stretchable structures is stretchable in a stretchable direction the same as an extending direction in which the connecting membrane bridge extends,
an end of the body portion is connected to the first ground electrode through at least one stretchable structure of the at least two stretchable structures, and another end of the body portion is connected to the second ground electrode through at least one other stretchable structure of the at least two stretchable structures,
the body portion comprises a base material of the connecting membrane bridge, and is provided therein with a plurality of opening patterns, the opening patterns each penetrate through the base material of the connecting membrane bridge.