US 12,216,414 B2
Self-referencing integrated alignment sensor
Mohamed Swillam, Wilton, CT (US); Justin Lloyd Kreuzer, Trumbull, CT (US); and Stephen Roux, New Fairfield, CT (US)
Assigned to ASML Holding N.V., Veldhoven (NL)
Appl. No. 18/012,799
Filed by ASML Holding N.V., Veldhoven (NL)
PCT Filed Jun. 9, 2021, PCT No. PCT/EP2021/065537
§ 371(c)(1), (2) Date Dec. 23, 2022,
PCT Pub. No. WO2021/259645, PCT Pub. Date Dec. 30, 2021.
Claims priority of provisional application 63/043,543, filed on Jun. 24, 2020.
Prior Publication US 2023/0266681 A1, Aug. 24, 2023
Int. Cl. G01B 11/00 (2006.01); G03F 9/00 (2006.01)
CPC G03F 9/7019 (2013.01) [G03F 9/7065 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system, comprising:
an illumination system configured to:
generate a multi-wavelength radiation beam comprising a first wavelength and a second wavelength; and
transmit the multi-wavelength radiation beam toward a region of a surface of a substrate;
a detection system comprising a multimode dispersion waveguide structure and first and second detectors,
wherein the multimode dispersion waveguide structure is configured to:
receive and propagate a first set of photons at the first wavelength and diffracted from the region of the surface of the substrate in response to an illumination of the region by the multi-wavelength radiation beam;
receive and propagate a second set of photons at the second wavelength and diffracted from the region of the surface of the substrate in response to the illumination of the region by the multi-wavelength radiation beam; and
wherein at least one of the first and second detectors is configured to generate an electronic signal based on the received first and second set of photons.