US 12,216,411 B2
Predictive apparatus in a gas discharge light source
Matthew Minakais, San Diego, CA (US)
Assigned to Cymer, LLC, San Diego, CA (US)
Appl. No. 17/782,283
Filed by Cymer, LLC, San Diego, CA (US)
PCT Filed Dec. 1, 2020, PCT No. PCT/US2020/062742
§ 371(c)(1), (2) Date Jun. 3, 2022,
PCT Pub. No. WO2021/126520, PCT Pub. Date Jun. 24, 2021.
Claims priority of provisional application 62/949,723, filed on Dec. 18, 2019.
Prior Publication US 2023/0020555 A1, Jan. 19, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70591 (2013.01) 32 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a decision module in communication with an optical system and an interface module, comprising a predetermined learning model, and being configured to:
receive, from the interface module, a performance metric relating to performance conditions of an optical system emitting a light beam;
estimate, based on the performance metric and the predetermined learning model, an effectiveness of a proposed change to the optical system; and
output a change command to the optical system if it is estimated that the proposed change to the optical system would be effective;
wherein the predetermined learning model receives as an input the performance metric and outputs the estimate.