| CPC G03F 7/0226 (2013.01) [G03F 7/0048 (2013.01); G03F 7/022 (2013.01); G03F 7/031 (2013.01); G03F 7/0397 (2013.01); G03F 7/0757 (2013.01)] | 17 Claims |
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1. A positive photosensitive resin composition comprising:
100 parts by weight of a siloxane-based copolymer;
5 to 50 parts by weight of a 1,2 quinonediazide compound;
0.1 to 10 parts by weight of one or more kinds of UV absorbers represented by the following Chemical Formula 1; and
a solvent included in such an amount that the solid content of the total resin composition becomes 10 to 90 wt %,
wherein the siloxane-based copolymer contains an unreacted monomer content less than 10 wt % and a residual catalyst content less than 2,000 ppm:
 wherein R1 is one or more functional groups selected from the group consisting of hydrogen, a substituted or unsubstituted C1-20 alkyl, a substituted or unsubstituted C3-20 cycloalkyl, a substituted or unsubstituted C2-10 alkenyl, a substituted or unsubstituted C6-18 aryl, a substituted or unsubstituted C7-18 alkylaryl, a substituted or unsubstituted C7-18 arylalkyl, a substituted or unsubstituted C1-20 alkoxy, a substituted or unsubstituted C1-30 acetal, a substituted or unsubstituted C1-30 hemiacetal, a substituted or unsubstituted C1-20 heteroalkyl, a substituted or unsubstituted C3-20 cycloheteroalkyl, a substituted or unsubstituted C2-10 heteroalkenyl, a substituted or unsubstituted C6-18 heteroaryl, a substituted or unsubstituted C7-18 heteroalkylaryl, a substituted or unsubstituted C7-18 heteroarylalkyl, a substituted or unsubstituted C1-20 heteroalkoxy, a substituted or unsubstituted C1-30 heteroacetal, and a substituted or unsubstituted C1-30 heterohemiacetal, and
wherein R2 to R5 are each independently one or more functional groups selected from the group consisting of hydrogen, hydroxy, a substituted or unsubstituted C1-20 alkyl, a substituted or unsubstituted C3-20 cycloalkyl, a substituted or unsubstituted C2-10 alkenyl, a substituted or unsubstituted C6-18 aryl, a substituted or unsubstituted C7-18 alkylaryl, a substituted or unsubstituted C7-18 arylalkyl, a substituted or unsubstituted C1-20 alkoxy, a substituted or unsubstituted C1-30 acetal, a substituted or unsubstituted C1-30 hemiacetal, a substituted or unsubstituted C1-20 heteroalkyl, a substituted or unsubstituted C3-20 cycloheteroalkyl, a substituted or unsubstituted C2-10 heteroalkenyl, a substituted or unsubstituted C6-18 heteroaryl, a substituted or unsubstituted C7-18 heteroalkylaryl, a substituted or unsubstituted C7-18 heteroarylalkyl, a substituted or unsubstituted C1-20 heteroalkoxy, a substituted or unsubstituted C1-30 heteroacetal, and a substituted or unsubstituted C1-30 heterohemiacetal.
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