US 12,216,402 B2
Photoacid generator
Gerhard Ingmar Meijer, Zurich (CH); Valery Weber, Gattikon (CH); and Peter Willem Jan Staar, Zurich (CH)
Assigned to International Business Machines Corporation, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Nov. 7, 2023, as Appl. No. 18/503,696.
Application 18/503,696 is a division of application No. 17/101,148, filed on Nov. 23, 2020, granted, now 11,846,886.
Prior Publication US 2024/0069442 A1, Feb. 29, 2024
Int. Cl. G03F 7/004 (2006.01); C07C 309/06 (2006.01); C07C 309/19 (2006.01); C07C 309/30 (2006.01); C07C 309/39 (2006.01); C07C 311/48 (2006.01); C07C 381/12 (2006.01); C07D 285/16 (2006.01); C07F 7/22 (2006.01); C07F 9/92 (2006.01); C07F 9/94 (2006.01); G03F 7/26 (2006.01); G03F 7/20 (2006.01)
CPC G03F 7/0045 (2013.01) [C07C 309/06 (2013.01); C07C 309/19 (2013.01); C07C 309/30 (2013.01); C07C 309/39 (2013.01); C07C 311/48 (2013.01); C07D 285/16 (2013.01); C07F 7/2208 (2013.01); C07F 9/92 (2013.01); C07F 9/94 (2013.01); G03F 7/26 (2013.01); C07C 381/12 (2013.01); C07C 2602/42 (2017.05); G03F 7/2004 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A photoacid generator compound cation using
Rn—X+
wherein X represents an element
(i) having for 92 eV photons (extreme ultraviolet (EUV)) an absorption cross section of at least 0.5×107·cm2/mol;
(ii) having at least two stable oxidation states; and
(iii) selected from the elements of group 1 to group 15 of the periodic table of the elements;
R represents a linear or branched or a cyclic unsubstituted or substituted alkyl group having 1 to 20 carbon atoms; or an unsubstituted or substituted aryl group having 3 to 30 carbon atoms; or an unsubstituted or a substituted unsaturated or a saturated heterocyclic group having a 3 to 30 membered ring; or derivatives thereof;
wherein at least two R groups are linked via a covalent bond with each other; and
n is 2 to 5.