CPC G03F 7/0045 (2013.01) [C07C 309/12 (2013.01); C07C 381/12 (2013.01); C07D 307/93 (2013.01); C08F 220/22 (2013.01); C08F 220/24 (2013.01); C08F 220/382 (2020.02); G03F 7/038 (2013.01); G03F 7/039 (2013.01); G03F 7/2041 (2013.01); G03F 7/30 (2013.01); C07C 2603/74 (2017.05)] | 19 Claims |
1. A sulfonium salt having the formula (1):
![]() wherein p is an integer of 1 to 5, q is an integer of 1 to 3,
RHF is hydrogen or fluorine,
R1 is a C1-C20 (p+1)-valent hydrocarbon group which may contain a heteroatom,
R2 is a C6-C20 aryl group or C7-C20 aralkyl group which may contain a heteroatom,
in case of q=1, any two of R1 and two R2 may bond together to form a ring with the sulfur atom to which they are attached, in case of q=2, any two of two R1 and R2 may bond together to form a ring with the sulfur atom to which they are attached, in case of q=3, any two of three R1 may bond together to form a ring with the sulfur atom to which they are attached, wherein the ring is selected from the group consisting of the following formulae:
![]() X− is a non-nucleophilic anion selected from the formulae (2A) to (2D):
![]() wherein Q1 and Q2 are each independently fluorine or a C1-C6 fluorinated alkyl group,
Q3 and Q4 are each independently hydrogen, fluorine or a C1-C6 fluorinated alkyl group,
k is an integer of 0 to 4,
L1 to L4 are each independently a single bond, ether bond, ester bond, sulfonic ester bond, carbonate bond or carbamate bond,
R5 is a C1-C30 hydrocarbyl group which may contain a heteroatom,
A1 is a C1-C30 hydrocarbylene group which may contain a heteroatom,
RA is each independently hydrogen, fluorine, methyl or trifluoromethyl,
X1 is a single bond, phenylene, naphthylene or (backbone)-C(═O)—O—X11—, X11 is a C1-C10 aliphatic hydrocarbylene group which may contain a hydroxy moiety, ether bond, ester bond or lactone ring, or phenylene or naphthylene group,
X2 is a single bond or —X21—C(═O)—O—, X21 is a C1-C20 hydrocarbylene group which may contain a heteroatom, and
X3 is a single bond, methylene, ethylene, phenylene, fluorinated phenylene, trifluoromethyl-substituted phenylene, —O—X31—, —C(═O)—O—X31—, or —C(═O)—NH—X31—, X31 is a C1-C6 aliphatic hydrocarbylene group, phenylene group, fluorinated phenylene group, or trifluoromethyl-substituted phenylene group, which may contain a carbonyl moiety, ester bond, ether bond or hydroxy moiety.
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