US 12,216,400 B2
Directed self-assembly
Lior Huli, Albany, NY (US); and Richard Farrell, Albany, NY (US)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Jan. 22, 2021, as Appl. No. 17/155,931.
Prior Publication US 2022/0236639 A1, Jul. 28, 2022
Int. Cl. G03F 7/00 (2006.01); B81C 1/00 (2006.01); C08L 25/06 (2006.01); C08L 53/00 (2006.01); C09D 153/00 (2006.01); B82Y 40/00 (2011.01)
CPC G03F 7/0002 (2013.01) [B81C 1/00031 (2013.01); C08L 25/06 (2013.01); C08L 53/00 (2013.01); C09D 153/00 (2013.01); B81C 2201/0149 (2013.01); B82Y 40/00 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for forming a device comprising:
blending, in a mixer within a fabrication facility, a first liquid comprising a first block copolymer with a second liquid comprising a second block copolymer to form a first mixture, the first block copolymer comprising a first homopolymer and a second homopolymer, the first homopolymer having a first mole fraction in the first liquid, the second block copolymer comprising the first homopolymer and the second homopolymer, the first homopolymer having a second mole fraction in the second liquid, the first mole fraction being different from the second mole fraction;
placing a substrate over a substrate holder of a processing chamber within the fabrication facility; and
coating the substrate with the first mixture within the processing chamber.