US 12,216,276 B2
Mirror unit
Daiki Suzuki, Hamamatsu (JP); Tomoyuki Ide, Hamamatsu (JP); and Yuki Morinaga, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Filed on Oct. 23, 2023, as Appl. No. 18/382,777.
Application 18/382,777 is a continuation of application No. 18/103,030, filed on Jan. 30, 2023, granted, now 11,835,716.
Application 18/103,030 is a continuation of application No. 17/749,697, filed on May 20, 2022, granted, now 11,782,267, issued on Oct. 10, 2023.
Application 17/749,697 is a continuation of application No. 16/775,456, filed on Jan. 29, 2020, granted, now 11,372,240, issued on Jun. 28, 2022.
Claims priority of application No. 2019-014610 (JP), filed on Jan. 30, 2019; and application No. 2020-011753 (JP), filed on Jan. 28, 2020.
Prior Publication US 2024/0053603 A1, Feb. 15, 2024
Int. Cl. G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 27/00 (2006.01)
CPC G02B 27/0031 (2013.01) [G02B 26/0833 (2013.01); G02B 26/085 (2013.01); G02B 26/10 (2013.01); G02B 26/101 (2013.01); G02B 27/0006 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A mirror unit comprising:
a base including a main surface and a rear surface opposite to the main surface,
an optical scanning device including a movable portion and a mirror surface provided on the movable portion, the optical scanning device being disposed on a side of the main surface with respect to the base,
a frame member disposed on the side of the main surface with respect to the base so as to surround the mirror surface when viewed from a first direction; and
a window member attached to the frame member so as to cover an opening of the frame member,
wherein the frame member includes a first wall portion and a second wall portion which face each other in a second direction perpendicular to the first direction,
wherein the window member is disposed on top surfaces of the first wall portion and the second wall portion,
wherein the main surface is provided with a depression,
wherein at least part of the movable portion of the optical scanning device faces a bottom surface of the depression,
wherein in a cross-section passing through the mirror surface and parallel to both the first direction and the second direction, at least one of a thickness of the first wall portion and a thickness of the second wall portion in the second direction, and also a thickness of the window member, are greater than a distance from a disposing surface of the base on which the optical scanning device is disposed to the bottom surface of the depression in the first direction,
wherein a height of the first wall portion from the main surface of the base is greater than a height of the second wall portion from the main surface of the base, and
wherein in the cross-section passing through the mirror surface and parallel to both the first direction and the second direction, a corner formed by an inner surface and a side surface of the window member, the side surface being on a side of the second wall portion, is on a side of the optical scanning device in the second direction relative to a corner formed by a top surface and an outer side surface of the second wall portion, the outer side surface being a surface opposite to the optical scanning device in the second direction.