US 12,216,264 B2
Dark-field confocal microscopic measurement apparatus and method based on vortex dichroism
Jian Liu, Harbin (CN); Chenguang Liu, Harbin (CN); and Zijie Hua, Harbin (CN)
Assigned to Harbin Institute of Technology, Harbin (CN)
Filed by Harbin Institute of Technology, Harbin (CN)
Filed on Jun. 11, 2024, as Appl. No. 18/739,866.
Application 18/739,866 is a continuation of application No. 18/433,985, filed on Feb. 6, 2024, abandoned.
Claims priority of application No. 202310253087.2 (CN), filed on Mar. 16, 2023.
Prior Publication US 2024/0329377 A1, Oct. 3, 2024
Int. Cl. G02B 21/00 (2006.01); G01N 21/88 (2006.01); G02B 21/26 (2006.01)
CPC G02B 21/0032 (2013.01) [G01N 21/8806 (2013.01); G02B 21/26 (2013.01); G01N 2021/8822 (2013.01); G01N 2021/8848 (2013.01)] 8 Claims
OG exemplary drawing
 
1. An apparatus, comprising an array vortex light generation module, an array vortex light illumination module and an array dark-field confocal detection module;
wherein the array vortex light generation module comprises, along a direction of light propagation, a laser, a half-wave plate, a quarter-wave plate, a one-dimensional scanning galvanometer, a scanning lens, a tube lens and an array vortex wave plate;
wherein the array vortex light illumination module comprises, along the direction of light propagation, a non-polarizing beam splitter, an objective lens, a three-dimensional moving stage configured to support a sample,
wherein the objective lens is configured to focus vortex illumination light beams onto the sample, and is configured to collect light from the sample;
wherein the non-polarizing beam splitter is configured to direct the light from the sample into the array dark-field confocal detection module; and
wherein the array dark-field confocal detection module comprises, along the direction of light propagation, an aperture diaphragm array, a focusing lens, a single-mode optical fiber and a photomultiplier tube (PMT) detector.