US 12,216,243 B2
Air-spaced encapsulated dielectric nanopillars for flat optical devices
Ludovic Godet, Sunnyvale, CA (US); Tapashree Roy, Bangalore (IN); Prerna Sonthalia Goradia, Mumbai (IN); Srobona Sen, Mumbai (IN); Robert Jan Visser, Menlo Park, CA (US); Nitin Deepak, Mumbai (IN); and Tapash Chakraborty, Maharashtra (IN)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 18, 2020, as Appl. No. 16/905,703.
Claims priority of application No. 201941024110 (IN), filed on Jun. 18, 2019.
Prior Publication US 2020/0400990 A1, Dec. 24, 2020
Int. Cl. G02F 1/1339 (2006.01); B32B 3/20 (2006.01); G02B 1/06 (2006.01)
CPC G02B 1/06 (2013.01) [B32B 3/20 (2013.01); G02B 2207/101 (2013.01); G02B 2207/109 (2013.01); G02F 1/13398 (2021.01)] 15 Claims
OG exemplary drawing
 
1. A flat optical device, comprising:
a substrate, the substrate having a first arrangement of a first plurality of pillars formed thereon, the first arrangement of the first plurality of pillars comprising:
pillars having a height h and a lateral distance d;
a gap g corresponding to a distance between adjacent pillars of the first plurality of pillars, and
a silica-containing aerogel material having an absorption coefficient less than 0.001 only disposed in each gap g; and
a first encapsulation layer disposed on the first arrangement of the first plurality of pillars, the first encapsulation layer is disposed on a top surface of each pillar of the first plurality of pillars and on the silica-containing aerogel material disposed in each gap g, the first encapsulation layer having a refractive index of about 1.0 to about 1.5.