US 12,216,069 B2
X-ray fluorescence spectrometer
Yasuhiko Nagoshi, Takatsuki (JP); Toshiaki Kozuki, Takatsuki (JP); and Yuki Fujimoto, Takatsuki (JP)
Assigned to RIGAKU CORPORATION, Tokyo (JP)
Filed by RIGAKU CORPORATION, Akishima (JP)
Filed on Jul. 9, 2024, as Appl. No. 18/767,325.
Application 18/767,325 is a continuation of application No. PCT/JP2022/041752, filed on Nov. 9, 2022.
Claims priority of application No. 2022-003823 (JP), filed on Jan. 13, 2022.
Prior Publication US 2024/0361263 A1, Oct. 31, 2024
Int. Cl. G01N 23/223 (2006.01)
CPC G01N 23/223 (2013.01) [G01N 2223/076 (2013.01); G01N 2223/1016 (2013.01)] 4 Claims
OG exemplary drawing
 
1. An X-ray fluorescence spectrometer configured to irradiate, with primary X-rays, a sample disposed in a sample chamber, and measure intensities of generated secondary X-rays using a detector disposed in a detection chamber, the X-ray fluorescence spectrometer comprising:
a vacuum chamber configured to be evacuated including at least the detection chamber;
a plurality of drive units each including a drive source outside the vacuum chamber, and configured to perform a mechanical operation in the vacuum chamber; and
a vacuum leakage location identification unit configured to
operate the drive units one at a time while monitoring a degree of vacuum in the vacuum chamber,
if a change in the degree of vacuum in the vacuum chamber before and after each of the operations is greater than or equal to a predetermined threshold, identify the relevant drive unit as a vacuum leakage location, and
cause information to that effect to be displayed in a display unit and/or be recorded in a recording unit.