US 12,216,050 B2
Method for calibrating a THz measuring apparatus, THz measuring method and corresponding THz measuring apparatus
Roland Böhm, Altenberge (DE)
Assigned to CiTEX Holding GmbH, Melle (DE)
Appl. No. 17/602,578
Filed by CiTEX Holding GmbH, Melle (DE)
PCT Filed Apr. 9, 2020, PCT No. PCT/DE2020/100292
§ 371(c)(1), (2) Date Oct. 8, 2021,
PCT Pub. No. WO2020/207540, PCT Pub. Date Oct. 15, 2020.
Claims priority of application No. 102019109339.2 (DE), filed on Apr. 9, 2019.
Prior Publication US 2022/0178677 A1, Jun. 9, 2022
Int. Cl. G01B 11/02 (2006.01); G01B 11/06 (2006.01); G01B 11/10 (2006.01); G01B 11/12 (2006.01); G01B 15/02 (2006.01); G01N 21/3581 (2014.01)
CPC G01N 21/3581 (2013.01) [G01B 11/028 (2013.01); G01B 11/06 (2013.01); G01B 11/0691 (2013.01); G01B 11/105 (2013.01); G01B 11/12 (2013.01); G01B 15/02 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for calibrating a THz measuring apparatus to a measurement object, the method comprising the steps of:
providing a THz measuring apparatus having a plurality of pivotable THz sensors, arranged in a circumferential direction around a measuring chamber, for putting out one transmitted THz beam each and receiving one reflected THz beam along a sensor axis,
orienting the plurality of pivotable THz sensors into a starting position in the measuring chamber, in which a measurement object is received,
allocating the plurality of pivotable THz sensors to at least one first sensor group and one second sensor group,
a first calibration adjustment step, in which the one second sensor group is adjusted as an adjustment group by means of the one first sensor group as a starting group,
a second calibration adjustment step, in which the one first sensor group is adjusted as an adjustment group by means of the adjusted one second sensor group as a starting group,
wherein in each of the first calibration adjustment step and the second calibration adjustment step:
by means of the starting group of the one first sensor group or the one second sensor group, spacing points on a surface of the measurement object are determined,
sensor correction angles of the adjustment group of the one first sensor group or the one second sensor group are determined by means of the spacing points determined by the starting group, and
the adjustment group of the one first sensor group or the one second sensor group is calibration adjusted about the determined sensor correction angles.