US 12,216,045 B2
Measurement apparatus
Tatsuya Ikehara, Kyoto (JP); Tetsuo Furumiya, Kyoto (JP); Koji Tojo, Kyoto (JP); and Hideki Tomita, Nagoya (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP); and National University Corporation Tokai National Higher Education and Research System, Nagoya (JP)
Filed by Shimadzu Corporation, Kyoto (JP); and National University Corporation Tokai National Higher Education and Research System, Nagoya (JP)
Filed on Jan. 26, 2023, as Appl. No. 18/101,644.
Claims priority of application No. 2022-010889 (JP), filed on Jan. 27, 2022.
Prior Publication US 2023/0236116 A1, Jul. 27, 2023
Int. Cl. G01N 21/31 (2006.01); G01N 33/00 (2006.01)
CPC G01N 21/31 (2013.01) [G01N 33/0027 (2013.01); G01N 2201/02 (2013.01); G01N 2201/0636 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A measurement apparatus comprising:
an optical resonator that resonates light;
a light source that generates light for irradiation of the optical resonator; and
a photodetector that detects light taken out of the optical resonator, wherein
the optical resonator includes
a plurality of mirrors,
a holder that holds the plurality of mirrors,
a first tubular portion including opposing ends in contact with the holder, the first tubular portion defining a space where the plurality of mirrors are accommodated,
a second tubular portion provided inside of the first tubular portion along the first tubular portion, and
a temperature adjustment portion that adjusts a temperature in the inside of the first tubular portion,
the holder is composed of a material lower in thermal expansion coefficient than the first tubular portion,
the first tubular portion includes
a first portion composed of a material higher in thermal conductivity than the holder, and
a second portion higher in elasticity than the first portion, and
the second tubular portion is composed of a material equal to or higher than the first portion in thermal conductivity and provided as far as positions of the plurality of mirrors on an inner side of the second portion.