US 12,216,031 B2
Station and method for measuring airborne molecular contamination
Bertrand Bellet, Annecy (FR); Julien Bounouar, Annecy (FR); and Olivier Le Barillec, Annecy (FR)
Assigned to PFEIFFER VACUUM, Annecy (FR)
Appl. No. 17/907,473
Filed by PFEIFFER VACUUM, Annecy (FR)
PCT Filed Mar. 26, 2021, PCT No. PCT/EP2021/058023
§ 371(c)(1), (2) Date Sep. 27, 2022,
PCT Pub. No. WO2021/198107, PCT Pub. Date Oct. 7, 2021.
Claims priority of application No. 2003266 (FR), filed on Apr. 1, 2020.
Prior Publication US 2023/0221220 A1, Jul. 13, 2023
Int. Cl. G01N 1/26 (2006.01); G01N 1/22 (2006.01); G01N 33/00 (2006.01); G01N 1/24 (2006.01)
CPC G01N 1/26 (2013.01) [G01N 1/2273 (2013.01); G01N 33/0011 (2013.01); G01N 2001/244 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A measurement station for measuring airborne molecular contamination comprising:
at least one gas analyser,
at least two controllable isolation valves connected in parallel to an input of the at least one gas analyser,
a conditioning pump,
at least two calibrated orifices connected in parallel to an input of the conditioning pump,
at least one distributor configured to connect each controllable isolation valve with, on one side, a sampling line and, on the other side, a calibrated orifice, and
a control unit linked to the controllable isolation valves and configured to command the opening or the closing of the controllable isolation valves in order to be able to connect the at least one gas analyser with at least one sampling line.