US 12,216,026 B2
Low power memristive vacuum sensor
Baker Mohammad, Abu Dhabi (AE); Khaled Muneer Mutlaq Humood, Edinburgh (GB); Maguy Abi Jaoude, Abu Dhabi (AE); and Sueda Saylan, Goztepe (TR)
Assigned to Khalifa University of Science and Technology, Abu Dhabi (AE)
Filed by Khalifa University of Science and Technology, Abu Dhabi (AE)
Filed on Jun. 14, 2022, as Appl. No. 17/840,335.
Claims priority of provisional application 63/216,438, filed on Jun. 29, 2021.
Prior Publication US 2022/0412836 A1, Dec. 29, 2022
Int. Cl. G01M 3/32 (2006.01); G01M 3/34 (2006.01); H10N 70/00 (2023.01)
CPC G01M 3/3236 (2013.01) [G01M 3/34 (2013.01); H10N 70/841 (2023.02); H10N 70/8833 (2023.02)] 18 Claims
OG exemplary drawing
 
1. A pressure detection system comprising:
a vacuum sensor comprising:
a substrate;
an oxide layer coupled to the substrate; and
a conductive top electrode coupled to the oxide layer; an indicator;
a controller electrically coupled to the vacuum sensor and the indicator, the controller configured to at least:
provide a readout signal to the vacuum sensor;
detect an output signal from the vacuum sensor, the output signal generated in response to the readout signal and corresponding to a resistance across the vacuum sensor measured from the conductive top electrode to the substrate; and
send an indication signal to the indicator, the indication signal corresponding to a level of the output signal, the level of the output signal associated with a pressure at the vacuum sensor.