US 12,216,019 B2
Apparatuses for testing the lateral and axial confocality of a scanning and descanning microscope component group
Joachim Fischer, Karlsruhe (DE); and Matthias Henrich, Heidelberg (DE)
Assigned to Abberior Instruments GmbH, Gôttingen (DE)
Filed by Abberior Instruments GmbH, Göttingen (DE)
Filed on Dec. 21, 2022, as Appl. No. 18/085,831.
Claims priority of application No. 10 2021 134 384.4 (DE), filed on Dec. 22, 2021.
Prior Publication US 2023/0194383 A1, Jun. 22, 2023
Int. Cl. G01M 11/02 (2006.01); G02B 21/00 (2006.01)
CPC G01M 11/0207 (2013.01) [G02B 21/0024 (2013.01)] 26 Claims
OG exemplary drawing
 
1. A scanning and descanning microscope component group comprising
a first light source having a first emission aperture and providing first illumination light emerging through the first emission aperture;
focusing optics focusing the first illumination light along an optical axis into a focal area;
a first detector having a first detection aperture and detecting first light coming out of the focal area;
a scanner arranged between the first light source and the first detector, on its one side, and the focal area, on its other side, the scanner being scanning laterally with respect to the optical axis;
at least one of
a first auxiliary detector arranged or to be arranged in the focal area, the first auxiliary detector comprising a plurality of auxiliary detection apertures in a plurality of auxiliary detection aperture positions arranged at distances in direction of the optical axis and laterally with respect to the optical axis,
 and
an auxiliary light source arranged or to be arranged in the focal area and providing auxiliary light, the auxiliary light source comprising a plurality of auxiliary emission apertures in a plurality of auxiliary emission aperture positions arranged at distances in direction of the optical axis and laterally with respect to the optical axis, the auxiliary light emerging through the plurality of auxiliary emission apertures,
 wherein, if both the auxiliary detector and the auxiliary light source are arranged in the focal area, each auxiliary detection aperture is concentric with one auxiliary emission aperture; and
a testing device;
wherein
the testing device is configured for scanning the plurality of auxiliary detection apertures of the auxiliary detector in the plurality of auxiliary detection aperture positions with the focused first illumination light by operating the scanner, wherein the testing device registers first intensity distributions of the first illumination light detected by the auxiliary detector over different settings of the scanner, or
a first further auxiliary detector having a first auxiliary detection aperture arranged concentrically with respect to the first emission aperture of the first light source is provided and wherein the testing device is configured for scanning the first auxiliary detection aperture with the auxiliary light that emerges through the plurality of auxiliary emission apertures of the auxiliary light source in the plurality of auxiliary emission aperture positions by operating the scanner, wherein the testing device registers first intensity distributions of the auxiliary light detected by the first further auxiliary detector over different settings of the scanner;
 and
wherein
the testing device is configured for scanning the first detection aperture of the first detector with the auxiliary light that emerges through the plurality of auxiliary emission apertures of the auxiliary light source in the plurality of auxiliary emission aperture positions by operating the scanner, wherein the testing device registers second intensity distributions of the auxiliary light detected by the first detector over the settings of the scanner, or
a first further auxiliary light source providing first further auxiliary light and having a first further auxiliary emission aperture, which is arranged concentrically with respect to the first detection aperture and through which the first further auxiliary light emerges, is provided, and wherein the testing device is configured for scanning the plurality of auxiliary detection apertures of the auxiliary detector in the plurality of auxiliary detection aperture positions with the first further auxiliary light by operating the scanner, wherein the testing device registers second intensity distributions of the first further auxiliary light detected by the first auxiliary detector over the settings of the scanner.