US 12,216,017 B2
Compliant tri-axial force sensor and method of fabricating the same
Zakareya Hussein, Edinburgh (GB)
Assigned to Touchlab Limited, Edinburgh (GB)
Appl. No. 17/629,663
Filed by Touchlab Limited, Edinburgh (GB)
PCT Filed Jul. 22, 2020, PCT No. PCT/EP2020/070636
§ 371(c)(1), (2) Date Jan. 24, 2022,
PCT Pub. No. WO2021/013874, PCT Pub. Date Jan. 28, 2021.
Claims priority of application No. 1910563 (GB), filed on Jul. 24, 2019.
Prior Publication US 2022/0252475 A1, Aug. 11, 2022
Int. Cl. G01L 5/162 (2020.01); G01L 1/18 (2006.01)
CPC G01L 5/162 (2013.01) [G01L 1/18 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A compliant tri-axial force sensor comprising:
a first electrode layer having an array of column electrodes in a first orientation;
a second electrode layer having an array of column electrodes in a second orientation, which is orthogonal to the first orientation;
a force-dependent active layer which is configured to change at least one property when subjected to a force and which is provided between the first electrode layer and the second electrode layer;
at least one three dimensional bump arranged to transmit externally applied force through the force-dependent active layer;
wherein at least one spacer is provided which is arranged to maintain a separation between two or more layers in the compliant tri-axial force sensor until an external force is applied; and
wherein the at least one spacer takes the form of a binder provided between the force-dependent active layer and the first and/or second electrode layer, wherein the binder is provided in gaps between adjacent column electrodes and extends between the force-dependent active layer and respective edges of said adjacent column electrodes; or wherein the force-dependent active layer comprises a first active layer and a second active layer with a gap there-between, and wherein the at least one spacer is provided within the force-dependent active layer.