US 12,216,016 B2
Frequency-modulating sensor array
Paul M. Hagelin, Saratoga, CA (US); Charles I. Grosjean, Los Gatos, CA (US); and Lev Goncharov, St. Petersburg (RU)
Assigned to SiTime Corporation, Santa Clara, CA (US)
Filed by SiTime Corporation, Santa Clara, CA (US)
Filed on Apr. 29, 2024, as Appl. No. 18/649,771.
Application 17/712,095 is a division of application No. 15/702,717, filed on Sep. 12, 2017, granted, now 11,320,329, issued on May 3, 2022.
Application 18/649,771 is a continuation of application No. 18/350,713, filed on Jul. 11, 2023, granted, now 12,000,748.
Application 18/350,713 is a continuation of application No. 18/080,243, filed on Dec. 13, 2022, granted, now 11,747,229, issued on Sep. 5, 2023.
Application 18/080,243 is a continuation of application No. 17/712,095, filed on Apr. 2, 2022, granted, now 11,609,136, issued on Mar. 21, 2023.
Claims priority of provisional application 62/438,987, filed on Dec. 23, 2016.
Claims priority of provisional application 62/393,640, filed on Sep. 12, 2016.
Prior Publication US 2024/0353277 A1, Oct. 24, 2024
Int. Cl. G01L 5/16 (2020.01); G01L 1/14 (2006.01); G01L 1/20 (2006.01); G01L 9/00 (2006.01)
CPC G01L 5/16 (2013.01) [G01L 1/146 (2013.01); G01L 1/205 (2013.01); G01L 9/001 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device comprising:
a surface having a region that is to receive a contact force;
a microelectromechanical systems (MEMS) resonator mounted relative to the region, the MEMS resonator having a body that is to vibrate under application of a drive signal and an electrode to generate an output that varies in dependence on a sensed resonant frequency of vibration of the MEMS resonator, wherein the sensed resonant frequency of vibration is to vary dependent on the contact force received by the region; and
circuitry to sample the output at discrete times and, dependent on the samples, to generate a digital value dependent on a change, in the sensed resonant frequency of vibration, caused by variation in the contact force, where the change corresponds to a threshold condition.