US 12,216,013 B2
Miniature pressure/force sensor with integrated leads
Michael W. Davis, Rockford, MN (US); Peter F. Ladwig, Hutchinson, MN (US); Matthew S. Lang, Excelsior, MN (US); Dean E. Myers, Stewart, MN (US); Clark T. Olsen, Dassel, MN (US); and Douglas P. Riemer, Waconia, MN (US)
Assigned to Hutchinson Technology Incorporated, Hutchinson, MN (US)
Filed by Hutchinson Technology Incorporated, Hutchinson, MN (US)
Filed on Nov. 9, 2023, as Appl. No. 18/388,473.
Application 17/587,865 is a division of application No. 15/424,282, filed on Feb. 3, 2017, granted, now 11,243,127, issued on Feb. 8, 2022.
Application 18/388,473 is a continuation of application No. 17/587,865, filed on Jan. 28, 2022, granted, now 11,867,575.
Claims priority of provisional application 62/403,765, filed on Oct. 4, 2016.
Claims priority of provisional application 62/290,789, filed on Feb. 3, 2016.
Prior Publication US 2024/0068889 A1, Feb. 29, 2024
Int. Cl. G01L 1/22 (2006.01); G01L 1/14 (2006.01)
CPC G01L 1/2268 (2013.01) [G01L 1/146 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A capacitive pressure sensor, comprising:
a first trace assembly, including:
a spring metal diaphragm including a base portion and a moving portion;
an insulating layer including a diaphragm portion on the moving portion of the diaphragm and a lead portion extending from the diaphragm; and
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion; and
a second trace assembly joined to the first trace assembly, including:
a diaphragm including a base;
an insulating layer having a diaphragm portion on the diaphragm and a lead portion extending from the diaphragm; and
a conductor layer on the insulating layer including an electrode on the diaphragm portion and a trace extending from the electrode on the lead portion.