US 12,215,989 B2
Differential-pressure-based flow meters
John Folden Stumpf, Portland, OR (US); and Karl Frederick Leeser, West Linn, OR (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/424,159
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Jan. 17, 2020, PCT No. PCT/US2020/014117
§ 371(c)(1), (2) Date Jul. 19, 2021,
PCT Pub. No. WO2020/154197, PCT Pub. Date Jul. 30, 2020.
Claims priority of provisional application 62/796,969, filed on Jan. 25, 2019.
Prior Publication US 2022/0107212 A1, Apr. 7, 2022
Int. Cl. G01F 1/36 (2006.01); G01F 1/42 (2006.01)
CPC G01F 1/363 (2013.01) [G01F 1/42 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A flow meter, comprising:
a flow path having an inlet portion and an outlet portion and configured to transport a fluid, the inlet portion and the outlet portion of the flow path being arranged substantially parallel to each other to transport the fluid in substantially opposing directions in the inlet portion and the outlet portion;
at least one flow-restrictor element within the flow path and arranged between the inlet portion and the outlet portion of the flow path and configured to impart a pressure drop to the fluid; and
a flow sensor arranged between the inlet portion and the outlet portion of the flow path, a first surface of the flow sensor is configured to be in direct fluid communication with the fluid that is flowing upstream of the at least one flow-restrictor element, a second surface on a portion of the flow sensor opposite to the first surface of the flow sensor is configured to be in direct fluid communication with the fluid that is flowing downstream of the at least one flow-restrictor element, the flow sensor being configured to sense a differential pressure in the fluid due to the at least one flow-restrictor element.