CPC G01B 5/30 (2013.01) [G01B 11/16 (2013.01)] | 14 Claims |
1. A shape correction device comprising:
a point measurement sensor that measures each of positions of predetermined points set on a surface of an inspection target;
a surface measurement sensor that measures a shape of a predetermined surface including the plurality of predetermined points by simultaneously measuring positions of a plurality of points of the inspection target, wherein the surface measurement sensor is arranged in parallel with the point measurement sensor at a distal end of a robotic arm of the shape correction device;
a computer that acquires data from the point measurement sensor and the surface measurement sensor and obtains an amount of deformation of the inspection target from a reference shape based on a displacement vector based on the positions of the predetermined points measured by the point measurement sensor and a normal direction of the predetermined surface measured by the surface measurement sensor; and
a shape correction unit comprising a servomotor, a movable die, and a fixed die, the movable die and the fixed die being arranged as to permit the inspection target to be located between the movable die and the fixed die, and the servomotor being configured to drive the movable die to press on the inspection target, and wherein the shape correction unit acquires data from the computer and corrects deformation of the inspection target based on the amount of deformation obtained by the computer.
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